Product List


Crab Leg type Acceleration sensor

Brief Description

STARC has fabricated crab leg type MEMS acceleration Sensors. It has achieved expertise to accurately fabricate the microstructures to meet the test and specification requirements. Fabricated Acceleration sensors are integrated with electronics in two chip package solutions and tested as a function of acceleration. SEM images of crab leg single axis z-axis acceleration structures are given below.



Semiconductor Technology and Applied Research Centre
(A unit of SITAR -Govt. of INDIA)
PO Box No.1640, off Old Madras Road,
Doorvani Nagar P.O.,
Bangalore 560 016, India.

Phone: 91 80 25653588
Fax: 91 80 25653590