Product List


Single Axis MEMS Accelerometer

Brief Description

STARC has established Fabrication Technology for manufacturing various MEMS acceleration Sensors. It has achieved expertise to accurately fabricate the microstructures to meet the test and specification requirements. Fabricated Acceleration sensors are integrated with electronics in two chip package solutions and tested as a function of acceleration. SEM images of single axis acceleration structures are given below.



Semiconductor Technology and Applied Research Centre
(A unit of SITAR -Govt. of INDIA)
PO Box No.1640, off Old Madras Road,
Doorvani Nagar P.O.,
Bangalore 560 016, India.

Phone: 91 80 25653588
Fax: 91 80 25653590