Product List

Products

RF MEMS

Brief Description

These are the MEMS test structures for realizing SPDT X-band

SPDT ku-band and Shunt SPST rf switching devices

6 micron Sacrificial layer

3 micron Al depo CMP of deposited oxide

CMP of Al layer

RF line width: 120 micron

Slot Gap : 80 micron

Switch: 2960/ 1900 micron from junction


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Specifications
  • SPDT (X-band): 9 – 12 GHz; 0.27 dB Insertion loss, -15 dB Return loss size : 3mm x 3mm
  • SPDT (ku-band): 16-18GHz; 0.22 dB Insertion loss, -15 dB Return loss size : 3mm x 3mm
  • Application : X-band and Ku-Band switches

Contacts

Semiconductor Technology and Applied Research Centre
(A unit of SITAR -Govt. of INDIA)
PO Box No.1640, off Old Madras Road,
Doorvani Nagar P.O.,
Bangalore 560 016, India.


Phone: 91 80 25653588
Fax: 91 80 25653590
Email: mail@sitarindia.com
URL: www.sitar.org.in